EDAX Element EDS

EDAX Element EDS

The EDAX Element EDS with APEX™ software for simple or advanced Elemental Micro-Analysis

Adding EDS to your Tabletop SEM turns it into a very powerful analytical tool allowing a multitude of capabilities using advanced microanalysis features for elemental analysis. The EDAX APEX™ software provides numerous capabilities for probing the samples composition, thickness and mapping of elements as shown in the screenshots and explanations below. With a conical pole piece design, the EDS signal is collected at the optimal solid angle unlike other Tabletop SEM designs.

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Hardware

Main Specifications of Element EDS for Tabletop SEM

  1. High speed embedded type SDD Dectector (No LN2 required)

  2. Energy resolution: Less than 133 eV (at Mn Ka)

  3. Detector area: 30mm

  4. Window: Silicon Nitride (Si3N4)

  5. Element detection range: Be(4) – Am(95)

  6. Maximum input count rate: > 300 kcps

  7. Software: Qualitative or Quantitative Analysis

  8. Analysis Modes: Point, Circle, Polygon, Line Scan, Mapping

  9. Touch Screen Mode

Software

APEX™

The APEX™ software is an idealized program developed for first-time users with analysis functions for Point and Area Qualitative or Quantitative Elemental Analysis, Mapping, Line Scan, and built-in Reporting. APEX™ is designed with a “project” methodology.

APEX_Project

Intuitive and Adjustable User Interface

Operators can start based on inspection settings as they have saved and analysis processes can be accomplished with minimal effort. “Only 3 clicks” needed tof collecting a Spectrum to Qualitative, Quantitative analysis, and saving. Multiple screen layouts are easily set with a single mouse click. Background colors can be set for either a light or dark preference.

APEX_Spectrum_light
APEX_Spectrum_dark

Qualitative / Quantitative analysis

  • Able to know the element and amount about unknown sample in a short time (within 1 min)

  • Get information of the area to see fast and easily by various scanning method (point, area…).

  • Reliable element analysis and 3 types of comparison charts or tables listing elements by Weight (wt%), Atomic (at%), Error (%)

  • ZAF corrections and analysis result tables

Multi-Point analysis

  • Mark several locations to inspect in the sample by point, area or other scanning method

  • Analyze and save automatically

  • Enhance reliability of analysis result by realizing 4 analysis conditions of selected area

APEX_Quant

High Speed Mapping

  • Analyze the distribution of elements easily of samples with different color coding

  • Obtain desired information in real time at low resolution or at higher resolution with short analysis times

APEX_Mapping

Line Scan

  • Another way to check elements distribution of sample. Analyze with the line set by user and assort the distribution of each element clearly.

  • Create SEM Image Line-scan overlap & Element Profile

Reporting

  • After acquiring results, reports can be generated per user requirements showing any of the acquired data in various formats

  • Ability to modify or edit by saving original file in MS Word, Excel, or PowerPoint formats, or PDF

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